Gründl, T. ; Zogal, K. ; Debernardi, P. ; Gierl, C. ; Grasse, C. ; Geiger, K. ; Meyer, R. ; Boehm, G. ; Amann, M.-C. ; Meissner, P. ; Küppers, F. (2013)
50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength.
In: Semiconductor Science and Technology, 28 (01)
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