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50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength

Gründl, T. ; Zogal, K. ; Debernardi, P. ; Gierl, C. ; Grasse, C. ; Geiger, K. ; Meyer, R. ; Boehm, G. ; Amann, M.-C. ; Meissner, P. ; Küppers, F. (2013):
50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength.
In: Semiconductor Science and Technology, 28 (01), ISSN 0268-1242,
[Article]

Item Type: Article
Erschienen: 2013
Creators: Gründl, T. ; Zogal, K. ; Debernardi, P. ; Gierl, C. ; Grasse, C. ; Geiger, K. ; Meyer, R. ; Boehm, G. ; Amann, M.-C. ; Meissner, P. ; Küppers, F.
Title: 50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength
Language: English
Journal or Publication Title: Semiconductor Science and Technology
Journal Volume: 28
Issue Number: 01
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP) > Photonics and Optical Communications
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP)
Date Deposited: 16 Mar 2015 16:37
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