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50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength

Gründl, T. and Zogal, K. and Debernardi, P. and Gierl, C. and Grasse, C. and Geiger, K. and Meyer, R. and Boehm, G. and Amann, M.-C. and Meissner, P. and Küppers, F. (2013):
50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength.
In: Semiconductor Science and Technology, 28, (01), ISSN 0268-1242,
[Article]

Item Type: Article
Erschienen: 2013
Creators: Gründl, T. and Zogal, K. and Debernardi, P. and Gierl, C. and Grasse, C. and Geiger, K. and Meyer, R. and Boehm, G. and Amann, M.-C. and Meissner, P. and Küppers, F.
Title: 50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength
Language: English
Journal or Publication Title: Semiconductor Science and Technology
Volume: 28
Number: 01
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics > Photonics and Optical Communications
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics
Date Deposited: 16 Mar 2015 16:37
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