Gründl, T. and Zogal, K. and Debernardi, P. and Gierl, C. and Grasse, C. and Geiger, K. and Meyer, R. and Boehm, G. and Amann, M.-C. and Meissner, P. and Küppers, F. (2013):
50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength.
In: Semiconductor Science and Technology, 28 (01), ISSN 0268-1242,
[Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 2013 |
| Creators: | Gründl, T. and Zogal, K. and Debernardi, P. and Gierl, C. and Grasse, C. and Geiger, K. and Meyer, R. and Boehm, G. and Amann, M.-C. and Meissner, P. and Küppers, F. |
| Title: | 50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength |
| Language: | English |
| Journal or Publication Title: | Semiconductor Science and Technology |
| Journal volume: | 28 |
| Number: | 01 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics > Photonics and Optical Communications 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics |
| Date Deposited: | 16 Mar 2015 16:37 |
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