Gründl, T. ; Zogal, K. ; Debernardi, P. ; Gierl, C. ; Grasse, C. ; Geiger, K. ; Meyer, R. ; Boehm, G. ; Amann, M.-C. ; Meissner, P. ; Küppers, F. (2013):
50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength.
In: Semiconductor Science and Technology, 28 (01), ISSN 0268-1242,
[Article]
Item Type: | Article |
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Erschienen: | 2013 |
Creators: | Gründl, T. ; Zogal, K. ; Debernardi, P. ; Gierl, C. ; Grasse, C. ; Geiger, K. ; Meyer, R. ; Boehm, G. ; Amann, M.-C. ; Meissner, P. ; Küppers, F. |
Title: | 50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength |
Language: | English |
Journal or Publication Title: | Semiconductor Science and Technology |
Journal Volume: | 28 |
Issue Number: | 01 |
Divisions: | 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP) > Photonics and Optical Communications 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP) |
Date Deposited: | 16 Mar 2015 16:37 |
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