Berky, W. ; Gottschalk, S. ; Elliman, R. G. ; Balogh, Adam G. (2006)
Orientation dependent ion beam mixing of Ta/Si interfaces.
In: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, 249 (1-2)
doi: 10.1016/j.nimb.2006.03.114
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