TU Darmstadt / ULB / TUbiblio

Orientation dependent ion beam mixing of Ta/Si interfaces

Berky, W. and Gottschalk, S. and Elliman, R. G. and Balogh, Adam G. (2006):
Orientation dependent ion beam mixing of Ta/Si interfaces.
In: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, 249 (1-2), pp. 200-203, ISSN 0168583X,
[Online-Edition: http://dx.doi.org/10.1016/j.nimb.2006.03.114],
[Article]

Item Type: Article
Erschienen: 2006
Creators: Berky, W. and Gottschalk, S. and Elliman, R. G. and Balogh, Adam G.
Title: Orientation dependent ion beam mixing of Ta/Si interfaces
Language: English
Journal or Publication Title: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
Volume: 249
Number: 1-2
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 24 Jun 2009 06:59
Official URL: http://dx.doi.org/10.1016/j.nimb.2006.03.114
Identification Number: doi:10.1016/j.nimb.2006.03.114
Export:
Suche nach Titel in: TUfind oder in Google
Send an inquiry Send an inquiry

Options (only for editors)

View Item View Item