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Orientation dependent ion beam mixing of Ta/Si interfaces

Berky, W. and Gottschalk, S. and Elliman, R. G. and Balogh, Adam G. :
Orientation dependent ion beam mixing of Ta/Si interfaces.
[Online-Edition: http://dx.doi.org/10.1016/j.nimb.2006.03.114]
In: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, 249 (1-2) pp. 200-203. ISSN 0168583X
[Article] , (2006)

Official URL: http://dx.doi.org/10.1016/j.nimb.2006.03.114
Item Type: Article
Erschienen: 2006
Creators: Berky, W. and Gottschalk, S. and Elliman, R. G. and Balogh, Adam G.
Title: Orientation dependent ion beam mixing of Ta/Si interfaces
Language: English
Journal or Publication Title: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
Volume: 249
Number: 1-2
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 24 Jun 2009 06:59
Official URL: http://dx.doi.org/10.1016/j.nimb.2006.03.114
Identification Number: doi:10.1016/j.nimb.2006.03.114
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