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Gierl, C. and Cole, G. D. and Kögel, B. and Jatta, S. and Zogal, K. and Davani, H. and Meissner, P. (2009):
Mechanical properties of a movable micro-mirror membrane for electrostatically tunable optical filters and vertical-cavity surface-emitting lasers.
IEEE, p. 1, [Online-Edition: http://elib1.lhb.tu-darmstadt.de/ieee/search/srchabstract.js...],
[Conference or Workshop Item]
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