Gierl, C. and Cole, G. D. and Kögel, B. and Jatta, S. and Zogal, K. and Davani, H. and Meissner, P. (2009):
Mechanical properties of a movable micro-mirror membrane for electrostatically tunable optical filters and vertical-cavity surface-emitting lasers.
p. 1, IEEE, [Conference or Workshop Item]