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Gierl, C. ; Cole, G. D. ; Kögel, B. ; Jatta, S. ; Zogal, K. ; Davani, H. ; Meissner, P. (2009):
Mechanical properties of a movable micro-mirror membrane for electrostatically tunable optical filters and vertical-cavity surface-emitting lasers.
p. 1, IEEE, [Conference or Workshop Item]

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