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Mechanical properties of a movable micro-mirror membrane for electrostatically tunable optical filters and vertical-cavity surface-emitting lasers

Gierl, C. and Cole, G. D. and Kögel, B. and Jatta, S. and Zogal, K. and Davani, H. and Meissner, P. (2009):
Mechanical properties of a movable micro-mirror membrane for electrostatically tunable optical filters and vertical-cavity surface-emitting lasers.
IEEE, [Online-Edition: http://elib1.lhb.tu-darmstadt.de/ieee/search/srchabstract.js...],
[Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2009
Creators: Gierl, C. and Cole, G. D. and Kögel, B. and Jatta, S. and Zogal, K. and Davani, H. and Meissner, P.
Title: Mechanical properties of a movable micro-mirror membrane for electrostatically tunable optical filters and vertical-cavity surface-emitting lasers
Language: English
Publisher: IEEE
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics > Photonics and Optical Communications
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics
Date Deposited: 08 Mar 2012 15:06
Official URL: http://elib1.lhb.tu-darmstadt.de/ieee/search/srchabstract.js...
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