Bejarano, G. ; Caicedo, J. M. ; Baca, E. ; Prieto, P. ; Balogh, Adam G. ; Enders, S. (2006)
Deposition of BC/BCN/c-BN multilayered thin films by r.f. magnetron sputtering.
In: Thin Solid Films, 494 (1-2)
doi: 10.1016/j.tsf.2005.08.192
Artikel, Bibliographie