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Deposition of BC/BCN/c-BN multilayered thin films by r.f. magnetron sputtering

Bejarano, G. and Caicedo, J. M. and Baca, E. and Prieto, P. and Balogh, Adam G. and Enders, S. (2006):
Deposition of BC/BCN/c-BN multilayered thin films by r.f. magnetron sputtering.
In: Thin Solid Films, 494 (1-2), pp. 53-57, ISSN 00406090,
[Online-Edition: http://dx.doi.org/10.1016/j.tsf.2005.08.192],
[Article]

Item Type: Article
Erschienen: 2006
Creators: Bejarano, G. and Caicedo, J. M. and Baca, E. and Prieto, P. and Balogh, Adam G. and Enders, S.
Title: Deposition of BC/BCN/c-BN multilayered thin films by r.f. magnetron sputtering
Language: English
Journal or Publication Title: Thin Solid Films
Volume: 494
Number: 1-2
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 24 Jun 2009 08:25
Official URL: http://dx.doi.org/10.1016/j.tsf.2005.08.192
Identification Number: doi:10.1016/j.tsf.2005.08.192
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