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Basuvalingam, Saravana Balaji and Zhang, Yue and Bloodgood, Matthew A. and Godiksen, Rasmus H. and Curto, Alberto G. and Hofmann, Jan P. and Verheijen, Marcel A. and Kessels, Wilhelmus M. M. and Bol, Ageeth A. (2019):
Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition.
In: Chemistry of Materials, (22), 31. pp. 9354-9362, ISSN 0897-4756,
DOI: 10.1021/acs.chemmater.9b02895,
[Online-Edition: https://doi.org/10.1021/acs.chemmater.9b02895],
[Article]

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