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Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition

Basuvalingam, Saravana Balaji and Zhang, Yue and Bloodgood, Matthew A. and Godiksen, Rasmus H. and Curto, Alberto G. and Hofmann, Jan P. and Verheijen, Marcel A. and Kessels, Wilhelmus M. M. and Bol, Ageeth A. (2019):
Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition.
In: Chemistry of Materials, (22), 31. pp. 9354-9362, ISSN 0897-4756,
DOI: 10.1021/acs.chemmater.9b02895,
[Online-Edition: https://doi.org/10.1021/acs.chemmater.9b02895],
[Article]

Item Type: Article
Erschienen: 2019
Creators: Basuvalingam, Saravana Balaji and Zhang, Yue and Bloodgood, Matthew A. and Godiksen, Rasmus H. and Curto, Alberto G. and Hofmann, Jan P. and Verheijen, Marcel A. and Kessels, Wilhelmus M. M. and Bol, Ageeth A.
Title: Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
Language: English
Journal or Publication Title: Chemistry of Materials
Journal volume: 31
Number: 22
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Surface Science
Date Deposited: 17 Jun 2020 05:26
DOI: 10.1021/acs.chemmater.9b02895
Official URL: https://doi.org/10.1021/acs.chemmater.9b02895
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