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Narayan, Suman ; Bae, Kraun ; Lehn, Robert ; Yadav, Sandeep ; Ott, Marcus ; Meckel, Tobias ; Stark, Robert W.
:
Low-pressure bonding of monolithic SU-8 microfluidic devices.
[Online-Edition: https://doi.org/10.1088/1361-6439/aae322]
In:
Journal of Micromechanics and Microengineering, 28
(12)
p. 125001.
ISSN 0960-1317
[Artikel]
, (2018)
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