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Low-pressure bonding of monolithic SU-8 microfluidic devices

Narayan, Suman ; Bae, Kraun ; Lehn, Robert ; Yadav, Sandeep ; Ott, Marcus ; Meckel, Tobias ; Stark, Robert W. :
Low-pressure bonding of monolithic SU-8 microfluidic devices.
[Online-Edition: https://doi.org/10.1088/1361-6439/aae322]
In: Journal of Micromechanics and Microengineering, 28 (12) S. 125001. ISSN 0960-1317
[Artikel] , (2018)

Offizielle URL: https://doi.org/10.1088/1361-6439/aae322

Kurzbeschreibung (Abstract)

Crosslinked SU-8 is a promising material for microfluidic and bio-MEMs applications because of its excellent optical properties, chemical stability, biocompatibility and low absorption of analytes. Thus, devices made out of SU-8 are very well suited for specialized applications such as live cell imaging. However, the design of monolithic SU-8 devices is often limited because the bonding of SU-8 layers usually requires a special bonding apparatus. Here, we present a reliable and user-friendly bonding method for SU-8 layers, which eases the fabrication of 3D SU-8 microfluidic devices. The top layer and the main layer of an SU-8 channel were bonded at pressures of 1, 2, 3, 4 and 8 kPa. The resulting bonding was free of voids in all cases, and the maximum bond strength was 6.5  ±  1.9 MPa, which is sufficient for most microfluidic applications. All the devices exhibited excellent stability under flow conditions. The device bonded at the lowest applied pressure (1 kPa) was tested for 24 h under a flow shear stress of 280 dynes cm−2 and showed no sign of leakage. Thus, the presented low-pressure bonding is a promising technique to fabricate SU-8 microfluidic devices.

Typ des Eintrags: Artikel
Erschienen: 2018
Autor(en): Narayan, Suman ; Bae, Kraun ; Lehn, Robert ; Yadav, Sandeep ; Ott, Marcus ; Meckel, Tobias ; Stark, Robert W.
Titel: Low-pressure bonding of monolithic SU-8 microfluidic devices
Sprache: Englisch
Kurzbeschreibung (Abstract):

Crosslinked SU-8 is a promising material for microfluidic and bio-MEMs applications because of its excellent optical properties, chemical stability, biocompatibility and low absorption of analytes. Thus, devices made out of SU-8 are very well suited for specialized applications such as live cell imaging. However, the design of monolithic SU-8 devices is often limited because the bonding of SU-8 layers usually requires a special bonding apparatus. Here, we present a reliable and user-friendly bonding method for SU-8 layers, which eases the fabrication of 3D SU-8 microfluidic devices. The top layer and the main layer of an SU-8 channel were bonded at pressures of 1, 2, 3, 4 and 8 kPa. The resulting bonding was free of voids in all cases, and the maximum bond strength was 6.5  ±  1.9 MPa, which is sufficient for most microfluidic applications. All the devices exhibited excellent stability under flow conditions. The device bonded at the lowest applied pressure (1 kPa) was tested for 24 h under a flow shear stress of 280 dynes cm−2 and showed no sign of leakage. Thus, the presented low-pressure bonding is a promising technique to fabricate SU-8 microfluidic devices.

Titel der Zeitschrift, Zeitung oder Schriftenreihe: Journal of Micromechanics and Microengineering
Band: 28
(Heft-)Nummer: 12
Verlag: IOP Publishing Ltd
Fachbereich(e)/-gebiet(e): 10 Fachbereich Biologie
10 Fachbereich Biologie > Membrane Dynamics
11 Fachbereich Material- und Geowissenschaften
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Physics of Surfaces
Exzellenzinitiative
Exzellenzinitiative > Exzellenzcluster
Exzellenzinitiative > Exzellenzcluster > Center of Smart Interfaces (CSI)
Hinterlegungsdatum: 29 Okt 2018 11:51
DOI: 10.1088/1361-6439/aae322
Offizielle URL: https://doi.org/10.1088/1361-6439/aae322
Sponsoren: The authors thank the German Science Foundation for funding under grant CRC 1194 project A07.
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