Narayan, Suman ; Bae, Kraun ; Lehn, Robert ; Yadav, Sandeep ; Ott, Marcus ; Meckel, Tobias ; Stark, Robert W. (2018)
Low-pressure bonding of monolithic SU-8 microfluidic devices.
In: Journal of Micromechanics and Microengineering, 28 (12)
doi: 10.1088/1361-6439/aae322
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Crosslinked SU-8 is a promising material for microfluidic and bio-MEMs applications because of its excellent optical properties, chemical stability, biocompatibility and low absorption of analytes. Thus, devices made out of SU-8 are very well suited for specialized applications such as live cell imaging. However, the design of monolithic SU-8 devices is often limited because the bonding of SU-8 layers usually requires a special bonding apparatus. Here, we present a reliable and user-friendly bonding method for SU-8 layers, which eases the fabrication of 3D SU-8 microfluidic devices. The top layer and the main layer of an SU-8 channel were bonded at pressures of 1, 2, 3, 4 and 8 kPa. The resulting bonding was free of voids in all cases, and the maximum bond strength was 6.5 ± 1.9 MPa, which is sufficient for most microfluidic applications. All the devices exhibited excellent stability under flow conditions. The device bonded at the lowest applied pressure (1 kPa) was tested for 24 h under a flow shear stress of 280 dynes cm−2 and showed no sign of leakage. Thus, the presented low-pressure bonding is a promising technique to fabricate SU-8 microfluidic devices.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2018 |
| Autor(en): | Narayan, Suman ; Bae, Kraun ; Lehn, Robert ; Yadav, Sandeep ; Ott, Marcus ; Meckel, Tobias ; Stark, Robert W. |
| Art des Eintrags: | Bibliographie |
| Titel: | Low-pressure bonding of monolithic SU-8 microfluidic devices |
| Sprache: | Englisch |
| Publikationsjahr: | 11 Oktober 2018 |
| Verlag: | IOP Publishing Ltd |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Journal of Micromechanics and Microengineering |
| Jahrgang/Volume einer Zeitschrift: | 28 |
| (Heft-)Nummer: | 12 |
| DOI: | 10.1088/1361-6439/aae322 |
| URL / URN: | https://doi.org/10.1088/1361-6439/aae322 |
| Kurzbeschreibung (Abstract): | Crosslinked SU-8 is a promising material for microfluidic and bio-MEMs applications because of its excellent optical properties, chemical stability, biocompatibility and low absorption of analytes. Thus, devices made out of SU-8 are very well suited for specialized applications such as live cell imaging. However, the design of monolithic SU-8 devices is often limited because the bonding of SU-8 layers usually requires a special bonding apparatus. Here, we present a reliable and user-friendly bonding method for SU-8 layers, which eases the fabrication of 3D SU-8 microfluidic devices. The top layer and the main layer of an SU-8 channel were bonded at pressures of 1, 2, 3, 4 and 8 kPa. The resulting bonding was free of voids in all cases, and the maximum bond strength was 6.5 ± 1.9 MPa, which is sufficient for most microfluidic applications. All the devices exhibited excellent stability under flow conditions. The device bonded at the lowest applied pressure (1 kPa) was tested for 24 h under a flow shear stress of 280 dynes cm−2 and showed no sign of leakage. Thus, the presented low-pressure bonding is a promising technique to fabricate SU-8 microfluidic devices. |
| Fachbereich(e)/-gebiet(e): | 10 Fachbereich Biologie 10 Fachbereich Biologie > Membrane Dynamics 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Physics of Surfaces DFG-Sonderforschungsbereiche (inkl. Transregio) DFG-Sonderforschungsbereiche (inkl. Transregio) > Sonderforschungsbereiche DFG-Sonderforschungsbereiche (inkl. Transregio) > Sonderforschungsbereiche > SFB 1194: Wechselseitige Beeinflussung von Transport- und Benetzungsvorgängen DFG-Sonderforschungsbereiche (inkl. Transregio) > Sonderforschungsbereiche > SFB 1194: Wechselseitige Beeinflussung von Transport- und Benetzungsvorgängen > Projektbereich A: Generische Experimente DFG-Sonderforschungsbereiche (inkl. Transregio) > Sonderforschungsbereiche > SFB 1194: Wechselseitige Beeinflussung von Transport- und Benetzungsvorgängen > Projektbereich A: Generische Experimente > A07: Raman-spektroskopische Untersuchung des Massetransports und des Konzentrationsgefälles in Gemischen |
| Hinterlegungsdatum: | 29 Okt 2018 11:51 |
| Letzte Änderung: | 19 Sep 2019 05:58 |
| PPN: | |
| Sponsoren: | The authors thank the German Science Foundation for funding under grant CRC 1194 project A07. |
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