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Low-pressure bonding of monolithic SU-8 microfluidic devices

Narayan, Suman and Bae, Kraun and Lehn, Robert and Yadav, Sandeep and Ott, Marcus and Meckel, Tobias and Stark, Robert W. :
Low-pressure bonding of monolithic SU-8 microfluidic devices.
[Online-Edition: https://doi.org/10.1088/1361-6439/aae322]
In: Journal of Micromechanics and Microengineering, 28 (12) p. 125001. ISSN 0960-1317
[Article] , (2018)

Official URL: https://doi.org/10.1088/1361-6439/aae322

Abstract

Crosslinked SU-8 is a promising material for microfluidic and bio-MEMs applications because of its excellent optical properties, chemical stability, biocompatibility and low absorption of analytes. Thus, devices made out of SU-8 are very well suited for specialized applications such as live cell imaging. However, the design of monolithic SU-8 devices is often limited because the bonding of SU-8 layers usually requires a special bonding apparatus. Here, we present a reliable and user-friendly bonding method for SU-8 layers, which eases the fabrication of 3D SU-8 microfluidic devices. The top layer and the main layer of an SU-8 channel were bonded at pressures of 1, 2, 3, 4 and 8 kPa. The resulting bonding was free of voids in all cases, and the maximum bond strength was 6.5  ±  1.9 MPa, which is sufficient for most microfluidic applications. All the devices exhibited excellent stability under flow conditions. The device bonded at the lowest applied pressure (1 kPa) was tested for 24 h under a flow shear stress of 280 dynes cm−2 and showed no sign of leakage. Thus, the presented low-pressure bonding is a promising technique to fabricate SU-8 microfluidic devices.

Item Type: Article
Erschienen: 2018
Creators: Narayan, Suman and Bae, Kraun and Lehn, Robert and Yadav, Sandeep and Ott, Marcus and Meckel, Tobias and Stark, Robert W.
Title: Low-pressure bonding of monolithic SU-8 microfluidic devices
Language: English
Abstract:

Crosslinked SU-8 is a promising material for microfluidic and bio-MEMs applications because of its excellent optical properties, chemical stability, biocompatibility and low absorption of analytes. Thus, devices made out of SU-8 are very well suited for specialized applications such as live cell imaging. However, the design of monolithic SU-8 devices is often limited because the bonding of SU-8 layers usually requires a special bonding apparatus. Here, we present a reliable and user-friendly bonding method for SU-8 layers, which eases the fabrication of 3D SU-8 microfluidic devices. The top layer and the main layer of an SU-8 channel were bonded at pressures of 1, 2, 3, 4 and 8 kPa. The resulting bonding was free of voids in all cases, and the maximum bond strength was 6.5  ±  1.9 MPa, which is sufficient for most microfluidic applications. All the devices exhibited excellent stability under flow conditions. The device bonded at the lowest applied pressure (1 kPa) was tested for 24 h under a flow shear stress of 280 dynes cm−2 and showed no sign of leakage. Thus, the presented low-pressure bonding is a promising technique to fabricate SU-8 microfluidic devices.

Journal or Publication Title: Journal of Micromechanics and Microengineering
Volume: 28
Number: 12
Publisher: IOP Publishing Ltd
Divisions: 10 Department of Biology
10 Department of Biology > Membrane Dynamics
11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Physics of Surfaces
DFG-Collaborative Research Centres (incl. Transregio)
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 1194: Interaction between Transport and Wetting Processes
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 1194: Interaction between Transport and Wetting Processes > Research Area A: Generic Experiments
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 1194: Interaction between Transport and Wetting Processes > Research Area A: Generic Experiments > A05: Wetting and Transport on Swellable, Immobilized Polymer Brushes and Polymer Networks
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 1194: Interaction between Transport and Wetting Processes > Research Area A: Generic Experiments > A07: Raman Spectroscopy for Investigating Mass Transport and Concentration Gradients in Mixtures
Exzellenzinitiative
Exzellenzinitiative > Clusters of Excellence
Date Deposited: 29 Oct 2018 11:51
DOI: 10.1088/1361-6439/aae322
Official URL: https://doi.org/10.1088/1361-6439/aae322
Funders: The authors thank the German Science Foundation for funding under grant CRC 1194 project A07.
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