Flege, Stefan ; Hatada, Ruriko ; Höfling, Marion ; Hanauer, A. ; Abel, A. ; Baba, Koumei ; Ensinger, Wolfgang (2015)
Modification of diamond-like carbon films by nitrogen incorporation via plasma immersion ion implantation.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 365 A
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