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Flege, Stefan ; Hatada, Ruriko ; Höfling, Marion ; Hanauer, A. ; Abel, A. ; Baba, Koumei ; Ensinger, Wolfgang (2015):
Modification of diamond-like carbon films by nitrogen incorporation via plasma immersion ion implantation.
In: Proceedings of the 19th International Conference on Ion Beam Modification of Materials (IBMM 2014), In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 365 A, pp. 357-361. ISSN 0168-583X,
[Article]

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