Assmann, W. ; Ban-d'Etat, B. ; Bender, M. ; Boduch, P. ; Grande, P. L. ; Lebius, H. ; Lelièvre, D. ; Marmitt, G. G. ; Rothard, H. ; Seidl, T. ; Severin, D. ; Voss, K.-O. ; Toulemonde, M. ; Trautmann, C. (2017)
Charge-state related effects in sputtering of LiF by swift heavy ions.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 392
doi: 10.1016/j.nimb.2016.12.013
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Sputtering experiments with swift heavy ions in the electronic energy loss regime were performed by using the catcher technique in combination with elastic recoil detection analysis. The angular distribution of particles sputtered from the surface of LiF single crystals is composed of a jet-like peak superimposed on a broad isotropic distribution. By using incident ions of fixed energy but different charges states, the influence of the electronic energy loss on both components is probed. We find indications that isotropic sputtering originates from near-surface layers, whereas the jet component may be affected by contributions from depth up to about 150 nm.
Typ des Eintrags: | Artikel |
---|---|
Erschienen: | 2017 |
Autor(en): | Assmann, W. ; Ban-d'Etat, B. ; Bender, M. ; Boduch, P. ; Grande, P. L. ; Lebius, H. ; Lelièvre, D. ; Marmitt, G. G. ; Rothard, H. ; Seidl, T. ; Severin, D. ; Voss, K.-O. ; Toulemonde, M. ; Trautmann, C. |
Art des Eintrags: | Bibliographie |
Titel: | Charge-state related effects in sputtering of LiF by swift heavy ions |
Sprache: | Englisch |
Publikationsjahr: | 1 Februar 2017 |
Verlag: | Elsevier Science Publishing |
Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
Jahrgang/Volume einer Zeitschrift: | 392 |
DOI: | 10.1016/j.nimb.2016.12.013 |
URL / URN: | https://doi.org/10.1016/j.nimb.2016.12.013 |
Kurzbeschreibung (Abstract): | Sputtering experiments with swift heavy ions in the electronic energy loss regime were performed by using the catcher technique in combination with elastic recoil detection analysis. The angular distribution of particles sputtered from the surface of LiF single crystals is composed of a jet-like peak superimposed on a broad isotropic distribution. By using incident ions of fixed energy but different charges states, the influence of the electronic energy loss on both components is probed. We find indications that isotropic sputtering originates from near-surface layers, whereas the jet component may be affected by contributions from depth up to about 150 nm. |
Freie Schlagworte: | Electronic energy loss, Sputtering, LiF, Jet component |
Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Ionenstrahlmodifizierte Materialien |
Hinterlegungsdatum: | 29 Dez 2017 12:21 |
Letzte Änderung: | 26 Sep 2018 14:24 |
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