Flege, Stefan ; Hatada, Ruriko ; Jantsen, Gennadi ; Walbert, Torsten ; Ensinger, Wolfgang ; Baba, Koumei ; Morimura, Takao ; Muench, Falk (2017)
Nanoparticles as a Metal Source in Plasma Processes.
In: Transactions of the Materials Research Society of Japan, 42 (2)
doi: 10.14723/tmrsj.42.31
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
When a metal is added to a layer of diamond-like carbon (DLC), the resulting particle size of the metal within the film usually depends on the metal content. To be more flexible in influencing the size of the particles that result when using a plasma based preparation process two different approaches were tested: on the one hand the combination of a gaseous precursor with magnetron sputtering, where a nanostructured coating is applied on top of the sputter target in advance; on the other hand, the addition of preformed metallic nanoparticles to a liquid. In both cases, the nanoparticles or -structures were prepared by a wet chemical process, whereas the DLC layer was prepared by a plasma process. The produced metal-containing DLC films were characterized regarding their metal content and distribution as well as regarding possible contaminations from the chemical preparation process.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2017 |
| Autor(en): | Flege, Stefan ; Hatada, Ruriko ; Jantsen, Gennadi ; Walbert, Torsten ; Ensinger, Wolfgang ; Baba, Koumei ; Morimura, Takao ; Muench, Falk |
| Art des Eintrags: | Bibliographie |
| Titel: | Nanoparticles as a Metal Source in Plasma Processes |
| Sprache: | Englisch |
| Publikationsjahr: | 21 Juli 2017 |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Transactions of the Materials Research Society of Japan |
| Jahrgang/Volume einer Zeitschrift: | 42 |
| (Heft-)Nummer: | 2 |
| DOI: | 10.14723/tmrsj.42.31 |
| URL / URN: | https://doi.org/10.14723/tmrsj.42.31 |
| Kurzbeschreibung (Abstract): | When a metal is added to a layer of diamond-like carbon (DLC), the resulting particle size of the metal within the film usually depends on the metal content. To be more flexible in influencing the size of the particles that result when using a plasma based preparation process two different approaches were tested: on the one hand the combination of a gaseous precursor with magnetron sputtering, where a nanostructured coating is applied on top of the sputter target in advance; on the other hand, the addition of preformed metallic nanoparticles to a liquid. In both cases, the nanoparticles or -structures were prepared by a wet chemical process, whereas the DLC layer was prepared by a plasma process. The produced metal-containing DLC films were characterized regarding their metal content and distribution as well as regarding possible contaminations from the chemical preparation process. |
| Freie Schlagworte: | nanoparticles, plasma, metal, diamond-like carbon |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik |
| Hinterlegungsdatum: | 21 Jul 2017 08:51 |
| Letzte Änderung: | 31 Jan 2019 06:58 |
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