Flege, S. ; Hatada, R. ; Kaiser, T. ; Muench, F. ; Cherkashinin, G. ; Schwöbel, A. ; Ensinger, W. ; Baba, K. (2016)
Use of a nanostructured surface coating to achieve higher sputter rates.
In: Materials Letters, 164
doi: 10.1016/j.matlet.2015.11.059
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
A method is presented which leads to a higher sputter rate as compared to the sputtering of the surface of a bulk sample under the same sputtering conditions: the target is coated beforehand by a separate process to produce a nanostructured film on its surface. In the case of silver, the sputter yield under ion bombardment is 1.7 times higher. If the ions for the bombardment are generated by a voltage applied to the sample, then improvements up to a factor of five can be realized. (C) 2015 Elsevier B.V. All rights reserved.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2016 |
| Autor(en): | Flege, S. ; Hatada, R. ; Kaiser, T. ; Muench, F. ; Cherkashinin, G. ; Schwöbel, A. ; Ensinger, W. ; Baba, K. |
| Art des Eintrags: | Bibliographie |
| Titel: | Use of a nanostructured surface coating to achieve higher sputter rates |
| Sprache: | Englisch |
| Publikationsjahr: | 1 Februar 2016 |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Materials Letters |
| Jahrgang/Volume einer Zeitschrift: | 164 |
| DOI: | 10.1016/j.matlet.2015.11.059 |
| Kurzbeschreibung (Abstract): | A method is presented which leads to a higher sputter rate as compared to the sputtering of the surface of a bulk sample under the same sputtering conditions: the target is coated beforehand by a separate process to produce a nanostructured film on its surface. In the case of silver, the sputter yield under ion bombardment is 1.7 times higher. If the ions for the bombardment are generated by a voltage applied to the sample, then improvements up to a factor of five can be realized. (C) 2015 Elsevier B.V. All rights reserved. |
| Freie Schlagworte: | Sputtering, Nanostructures, Thin films |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Oberflächenforschung |
| Hinterlegungsdatum: | 06 Jun 2016 11:23 |
| Letzte Änderung: | 11 Jul 2016 06:27 |
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