Winterstein, Thomas ; Schlaak, Helmut F. (2014)
Electrothermal Pseudo Bimorph Actuators Made of SU-8 with Improved Mechanical Performance.
ACTUATOR12, 14th International Conference on New Actuators and 8th International Exhibition on Smart Actuators and Drive Systems. Bremen, Germany (23.06.2014-25.06.2014)
Konferenzveröffentlichung, Bibliographie
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Kurzbeschreibung (Abstract)
In this paper we present improved polymer electrothermal actuators made of the epoxy-based UV-negative photoresist SU-8 with metallic heater. Based on a reference design with meandered heater of 50 µm path width, a new meander pattern with a path width of 20 µm is introduced. A novel design, taking into account thermal losses of a given actuator geometry is developed and both, the reference and the new geometry simulated using Ansys Workbench 15. The homogeneity of temperature distribution is improved by 20 %, leading to higher actuator deflection and blocking force. Actuators with both geometries are fabricated using surface micromachining. The characterization shows deflections of 320 µm and blocking forces of 90 mN, at 200 mW of electrical power consumption. The new heater design improves the mechanical performance by 25 %.
| Typ des Eintrags: | Konferenzveröffentlichung |
|---|---|
| Erschienen: | 2014 |
| Autor(en): | Winterstein, Thomas ; Schlaak, Helmut F. |
| Art des Eintrags: | Bibliographie |
| Titel: | Electrothermal Pseudo Bimorph Actuators Made of SU-8 with Improved Mechanical Performance |
| Sprache: | Englisch |
| Publikationsjahr: | 23 Juni 2014 |
| Veranstaltungstitel: | ACTUATOR12, 14th International Conference on New Actuators and 8th International Exhibition on Smart Actuators and Drive Systems |
| Veranstaltungsort: | Bremen, Germany |
| Veranstaltungsdatum: | 23.06.2014-25.06.2014 |
| Kurzbeschreibung (Abstract): | In this paper we present improved polymer electrothermal actuators made of the epoxy-based UV-negative photoresist SU-8 with metallic heater. Based on a reference design with meandered heater of 50 µm path width, a new meander pattern with a path width of 20 µm is introduced. A novel design, taking into account thermal losses of a given actuator geometry is developed and both, the reference and the new geometry simulated using Ansys Workbench 15. The homogeneity of temperature distribution is improved by 20 %, leading to higher actuator deflection and blocking force. Actuators with both geometries are fabricated using surface micromachining. The characterization shows deflections of 320 µm and blocking forces of 90 mN, at 200 mW of electrical power consumption. The new heater design improves the mechanical performance by 25 %. |
| Freie Schlagworte: | Electrothermal actuator, SU-8, meandered heater, surface micromachining, optimization |
| Fachbereich(e)/-gebiet(e): | 18 Fachbereich Elektrotechnik und Informationstechnik 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Elektromechanische Konstruktionen (aufgelöst 18.12.2018) 18 Fachbereich Elektrotechnik und Informationstechnik > Mikrotechnik und Elektromechanische Systeme |
| Hinterlegungsdatum: | 29 Sep 2014 12:03 |
| Letzte Änderung: | 26 Aug 2018 21:28 |
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- Electrothermal Pseudo Bimorph Actuators Made of SU-8 with Improved Mechanical Performance. (deposited 29 Sep 2014 12:03) [Gegenwärtig angezeigt]
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