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Electrothermal Pseudo Bimorph Actuators Made of SU-8 with Improved Mechanical Performance

Winterstein, Thomas and Noronha, Kenneth M. and Schlaak, Helmut F. (2014):
Electrothermal Pseudo Bimorph Actuators Made of SU-8 with Improved Mechanical Performance.
In: ACTUATOR12, 14th International Conference on New Actuators and 8th International Exhibition on Smart Actuators and Drive Systems, Bremen, Germany, 23.Jun.-25.Jun. 2014, [Conference or Workshop Item]

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Abstract

In this paper we present improved polymer electrothermal actuators made of the epoxy-based UV-negative photoresist SU-8 with metallic heater. Based on a reference design with meandered heater of 50 µm path width, a new meander pattern with a path width of 20 µm is introduced. A novel design, taking into account thermal losses of a given actuator geometry is developed and both, the reference and the new geometry simulated using Ansys Workbench 15. The homogeneity of temperature distribution is improved by 20 %, leading to higher actuator deflection and blocking force. Actuators with both geometries are fabricated using surface micromachining. The characterization shows deflections of 320 µm and blocking forces of 90 mN, at 200 mW of electrical power consumption. The new heater design improves the mechanical performance by 25 %.

Item Type: Conference or Workshop Item
Erschienen: 2014
Creators: Winterstein, Thomas and Noronha, Kenneth M. and Schlaak, Helmut F.
Title: Electrothermal Pseudo Bimorph Actuators Made of SU-8 with Improved Mechanical Performance
Language: English
Abstract:

In this paper we present improved polymer electrothermal actuators made of the epoxy-based UV-negative photoresist SU-8 with metallic heater. Based on a reference design with meandered heater of 50 µm path width, a new meander pattern with a path width of 20 µm is introduced. A novel design, taking into account thermal losses of a given actuator geometry is developed and both, the reference and the new geometry simulated using Ansys Workbench 15. The homogeneity of temperature distribution is improved by 20 %, leading to higher actuator deflection and blocking force. Actuators with both geometries are fabricated using surface micromachining. The characterization shows deflections of 320 µm and blocking forces of 90 mN, at 200 mW of electrical power consumption. The new heater design improves the mechanical performance by 25 %.

Uncontrolled Keywords: Electrothermal actuator, SU-8, meandered heater, surface micromachining, optimization
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
Event Title: ACTUATOR12, 14th International Conference on New Actuators and 8th International Exhibition on Smart Actuators and Drive Systems
Event Location: Bremen, Germany
Event Dates: 23.Jun.-25.Jun. 2014
Date Deposited: 29 Sep 2014 12:03
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