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Evidence of diffusion at BaTiO3/silicon interfaces

Chung, U.-C. and Michau, D. and Elissalde, C. and Li, S. and Klein, Andreas and Maglione, M. (2012):
Evidence of diffusion at BaTiO3/silicon interfaces.
In: Thin Solid Films, Elsevier Science Publishing, pp. 1997-2000, 520, (6), ISSN 00406090, [Online-Edition: http://dx.doi.org/10.1016/j.tsf.2011.09.055],
[Article]

Abstract

Interdiffusion at interfaces between several materials in integrated structures is becoming more and more challenging. We performed a deep study of diffusion in BaTiO3/Si films using X-Ray Diffraction analysis, Rutherford Backscattering Spectrometry and X-ray Photoelectron Spectroscopy at intermediate annealing stages. We show that controlling local chemistry through inter-diffusion phenomena at interfaces is possible thanks to the structural and chemical matching between BaTiO3 and fresnoite. BaTiO3/Si stacks can serve as a model system to investigate the interphase generation at interfaces.

Item Type: Article
Erschienen: 2012
Creators: Chung, U.-C. and Michau, D. and Elissalde, C. and Li, S. and Klein, Andreas and Maglione, M.
Title: Evidence of diffusion at BaTiO3/silicon interfaces
Language: English
Abstract:

Interdiffusion at interfaces between several materials in integrated structures is becoming more and more challenging. We performed a deep study of diffusion in BaTiO3/Si films using X-Ray Diffraction analysis, Rutherford Backscattering Spectrometry and X-ray Photoelectron Spectroscopy at intermediate annealing stages. We show that controlling local chemistry through inter-diffusion phenomena at interfaces is possible thanks to the structural and chemical matching between BaTiO3 and fresnoite. BaTiO3/Si stacks can serve as a model system to investigate the interphase generation at interfaces.

Journal or Publication Title: Thin Solid Films
Volume: 520
Number: 6
Publisher: Elsevier Science Publishing
Uncontrolled Keywords: Barium titanate, Interface, Rutherford Backscattering Spectrometry, RBS), Thin films, Diffusion, X-ray photoelectron spectroscopy (XPS), Interphase growth
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Surface Science
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 26 Nov 2013 12:21
Official URL: http://dx.doi.org/10.1016/j.tsf.2011.09.055
Identification Number: doi:10.1016/j.tsf.2011.09.055
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