Chung, U.-C. ; Michau, D. ; Elissalde, C. ; Li, S. ; Klein, Andreas ; Maglione, M. (2012)
Evidence of diffusion at BaTiO3/silicon interfaces.
In: Thin Solid Films, 520 (6)
doi: 10.1016/j.tsf.2011.09.055
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Interdiffusion at interfaces between several materials in integrated structures is becoming more and more challenging. We performed a deep study of diffusion in BaTiO3/Si films using X-Ray Diffraction analysis, Rutherford Backscattering Spectrometry and X-ray Photoelectron Spectroscopy at intermediate annealing stages. We show that controlling local chemistry through inter-diffusion phenomena at interfaces is possible thanks to the structural and chemical matching between BaTiO3 and fresnoite. BaTiO3/Si stacks can serve as a model system to investigate the interphase generation at interfaces.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2012 |
| Autor(en): | Chung, U.-C. ; Michau, D. ; Elissalde, C. ; Li, S. ; Klein, Andreas ; Maglione, M. |
| Art des Eintrags: | Bibliographie |
| Titel: | Evidence of diffusion at BaTiO3/silicon interfaces |
| Sprache: | Englisch |
| Publikationsjahr: | 1 Januar 2012 |
| Verlag: | Elsevier Science Publishing |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Thin Solid Films |
| Jahrgang/Volume einer Zeitschrift: | 520 |
| (Heft-)Nummer: | 6 |
| DOI: | 10.1016/j.tsf.2011.09.055 |
| Kurzbeschreibung (Abstract): | Interdiffusion at interfaces between several materials in integrated structures is becoming more and more challenging. We performed a deep study of diffusion in BaTiO3/Si films using X-Ray Diffraction analysis, Rutherford Backscattering Spectrometry and X-ray Photoelectron Spectroscopy at intermediate annealing stages. We show that controlling local chemistry through inter-diffusion phenomena at interfaces is possible thanks to the structural and chemical matching between BaTiO3 and fresnoite. BaTiO3/Si stacks can serve as a model system to investigate the interphase generation at interfaces. |
| Freie Schlagworte: | Barium titanate, Interface, Rutherford Backscattering Spectrometry, RBS), Thin films, Diffusion, X-ray photoelectron spectroscopy (XPS), Interphase growth |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Oberflächenforschung 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften |
| Hinterlegungsdatum: | 26 Nov 2013 12:21 |
| Letzte Änderung: | 26 Mär 2015 20:20 |
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