Greiner, Felix ; Schlaak, Helmut F. (2012)
Cleanroom Laboratory for Micro- and Nanotechnology.
4th International Target Fabrication Workshop. Mainz
Konferenzveröffentlichung, Erstveröffentlichung
Kurzbeschreibung (Abstract)
This poster aims to show the possibilities of a small scale research lab that focusses on surface micromachining processes without CMOS compatibility. Its size of 100 m^2 cleanroom keeps the flexibility to easily introduce exceptional materials but nevertheless offers a set of standard procedures for UV lithography and UV depth lithography, wet etching, electroplating, PVD, dry etching, packaging and characterization, respectively. The installations are optimized for 100 mm wafers and low temperature (< 150°C) surface micromachining, see figure.
The technology foci are Direct LIGA and long term stable ultra thick (200 µm .. 1.2 mm) functional materials based on epoxy resins. The combination of UV Direct LIGA (lithography, subsequent automatically driven electroplating and final release of metal structures from polymer molds) and nanotechnology offer potential for new MEMS and NEMS.
The nanotechnology aspect is introduced by the wafer level integration of ion track etched polymer membranes, e.g. made by GSI material research. The membranes act as molds for electroplating while UV lithography shapes the outer dimensions of the nanowire arrays.
Substrate materials currently comprise Silicon, glasses, ceramics and printed circuit board glass fibre reinforced plastic (FR4). Structures are made of Ni, Cu, Au, Cr, Al, epoxy resins like different SU-8 formulations, polycarbonate and combinations of those.
Figure: Part of the cleanroom laboratory installations, for details see http://www.emk.tu-darmstadt.de/en/institute/equipment/
| Typ des Eintrags: | Konferenzveröffentlichung |
|---|---|
| Erschienen: | 2012 |
| Autor(en): | Greiner, Felix ; Schlaak, Helmut F. |
| Art des Eintrags: | Erstveröffentlichung |
| Titel: | Cleanroom Laboratory for Micro- and Nanotechnology |
| Sprache: | Englisch |
| Publikationsjahr: | 19 August 2012 |
| Ort: | Mainz |
| Buchtitel: | Book of Abstracts on 4th International Target Fabrication Workshop |
| Veranstaltungstitel: | 4th International Target Fabrication Workshop |
| Veranstaltungsort: | Mainz |
| URL / URN: | http://targetfabrication.com/index.html |
| Zugehörige Links: | |
| Kurzbeschreibung (Abstract): | This poster aims to show the possibilities of a small scale research lab that focusses on surface micromachining processes without CMOS compatibility. Its size of 100 m^2 cleanroom keeps the flexibility to easily introduce exceptional materials but nevertheless offers a set of standard procedures for UV lithography and UV depth lithography, wet etching, electroplating, PVD, dry etching, packaging and characterization, respectively. The installations are optimized for 100 mm wafers and low temperature (< 150°C) surface micromachining, see figure. The technology foci are Direct LIGA and long term stable ultra thick (200 µm .. 1.2 mm) functional materials based on epoxy resins. The combination of UV Direct LIGA (lithography, subsequent automatically driven electroplating and final release of metal structures from polymer molds) and nanotechnology offer potential for new MEMS and NEMS. The nanotechnology aspect is introduced by the wafer level integration of ion track etched polymer membranes, e.g. made by GSI material research. The membranes act as molds for electroplating while UV lithography shapes the outer dimensions of the nanowire arrays. Substrate materials currently comprise Silicon, glasses, ceramics and printed circuit board glass fibre reinforced plastic (FR4). Structures are made of Ni, Cu, Au, Cr, Al, epoxy resins like different SU-8 formulations, polycarbonate and combinations of those. Figure: Part of the cleanroom laboratory installations, for details see http://www.emk.tu-darmstadt.de/en/institute/equipment/ |
| URN: | urn:nbn:de:tuda-tuprints-31222 |
| Sachgruppe der Dewey Dezimalklassifikatin (DDC): | 500 Naturwissenschaften und Mathematik > 530 Physik 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften und Maschinenbau |
| Fachbereich(e)/-gebiet(e): | 18 Fachbereich Elektrotechnik und Informationstechnik 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Elektromechanische Konstruktionen (aufgelöst 18.12.2018) 18 Fachbereich Elektrotechnik und Informationstechnik > Mikrotechnik und Elektromechanische Systeme |
| Hinterlegungsdatum: | 18 Mär 2013 16:26 |
| Letzte Änderung: | 26 Aug 2018 21:27 |
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