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Progress in Device Isolation Technology

Schwalke, Udo (2001):
Progress in Device Isolation Technology.
41, In: Microelectronis Reliability, (4), pp. 483-490. [Article]

Item Type: Article
Erschienen: 2001
Creators: Schwalke, Udo
Title: Progress in Device Isolation Technology
Language: English
Journal or Publication Title: Microelectronis Reliability
Volume: 41
Number: 4
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Date Deposited: 19 Nov 2008 16:28
Official URL: http://dx.doi.org/10.1016/S0026-2714(00)00259-6
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