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Formation of ordered nanoscale semiconductor dots by ion sputtering

Facsko, S. ; Dekorsy, T. ; Trappe, C. ; Kurz, H. ; Vogt, Alexander ; Hartnagel, H. L. (1999):
Formation of ordered nanoscale semiconductor dots by ion sputtering.
In: American Association for Advance of Science, 285, pp. 1551-1553. [Article]

Item Type: Article
Erschienen: 1999
Creators: Facsko, S. ; Dekorsy, T. ; Trappe, C. ; Kurz, H. ; Vogt, Alexander ; Hartnagel, H. L.
Title: Formation of ordered nanoscale semiconductor dots by ion sputtering
Language: English
Journal or Publication Title: American Association for Advance of Science
Journal Volume: 285
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:20
License: [undefiniert]
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