Article

Ensinger, Wolfgang ; Kraft, Gunther ; Sittner, Falk ; Volz, Kerstin ; Baba, Koumei ; Hatada, Ruriko (2007)
Silicon carbide and boron carbide thin films formed by plasma immersion ion implantation of hydrocarbon gases.
In: Surface and Coatings Technology, 201 (19-20)
Article, Bibliographie

Ensinger, Wolfgang ; Volz, Kerstin ; Baba, Koumei ; Hatada, Ruriko (2007)
Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures.
In: Nuclear Instruments and Methods in Physics Research Section B, 257 (1-2)
Article, Bibliographie