Ensinger, Wolfgang ; Volz, Kerstin ; Baba, Koumei ; Hatada, Ruriko (2007)
Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures.
In: Nuclear Instruments and Methods in Physics Research Section B, 257 (1-2)
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Plasma immersion ion implantation of silicon with methane, toluene and mixtures of both as plasma-foming gases gave films of amorphous carbon (a-C:H, or diamond-like carbon DLC) on a transition zone of silicon carbide, as shown by X-ray photoelectron spectrometry and Rutherford backscattering spectrometry. Toluene leads to faster DLC film growth than methane. Raman spectra showed the typical D- and G-bands of DLC, in case of toluene more distinct than for toluene. IR-spectroscopy gave indications of SiC and C–H bonds.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2007 |
| Autor(en): | Ensinger, Wolfgang ; Volz, Kerstin ; Baba, Koumei ; Hatada, Ruriko |
| Art des Eintrags: | Bibliographie |
| Titel: | Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures |
| Sprache: | Englisch |
| Publikationsjahr: | April 2007 |
| Verlag: | Elsevier |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Nuclear Instruments and Methods in Physics Research Section B |
| Jahrgang/Volume einer Zeitschrift: | 257 |
| (Heft-)Nummer: | 1-2 |
| Kurzbeschreibung (Abstract): | Plasma immersion ion implantation of silicon with methane, toluene and mixtures of both as plasma-foming gases gave films of amorphous carbon (a-C:H, or diamond-like carbon DLC) on a transition zone of silicon carbide, as shown by X-ray photoelectron spectrometry and Rutherford backscattering spectrometry. Toluene leads to faster DLC film growth than methane. Raman spectra showed the typical D- and G-bands of DLC, in case of toluene more distinct than for toluene. IR-spectroscopy gave indications of SiC and C–H bonds. |
| Zusätzliche Informationen: | Ion Beam Modification of Materials — Proceedings of the 15th International Conference on Ion Beam Modification of Materials 15th International Conference on Ion Beam Modification of Materials |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik |
| Hinterlegungsdatum: | 20 Nov 2008 08:28 |
| Letzte Änderung: | 20 Feb 2020 13:23 |
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