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Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures

Ensinger, Wolfgang ; Volz, Kerstin ; Baba, Koumei ; Hatada, Ruriko :
Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures.
In: Nuclear Instruments and Methods in Physics Research Section B, 257 (1-2) pp. 692-695.
[Artikel], (2007)

Kurzbeschreibung (Abstract)

Plasma immersion ion implantation of silicon with methane, toluene and mixtures of both as plasma-foming gases gave films of amorphous carbon (a-C:H, or diamond-like carbon DLC) on a transition zone of silicon carbide, as shown by X-ray photoelectron spectrometry and Rutherford backscattering spectrometry. Toluene leads to faster DLC film growth than methane. Raman spectra showed the typical D- and G-bands of DLC, in case of toluene more distinct than for toluene. IR-spectroscopy gave indications of SiC and C–H bonds.

Typ des Eintrags: Artikel
Erschienen: 2007
Autor(en): Ensinger, Wolfgang ; Volz, Kerstin ; Baba, Koumei ; Hatada, Ruriko
Titel: Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures
Sprache: Englisch
Kurzbeschreibung (Abstract):

Plasma immersion ion implantation of silicon with methane, toluene and mixtures of both as plasma-foming gases gave films of amorphous carbon (a-C:H, or diamond-like carbon DLC) on a transition zone of silicon carbide, as shown by X-ray photoelectron spectrometry and Rutherford backscattering spectrometry. Toluene leads to faster DLC film growth than methane. Raman spectra showed the typical D- and G-bands of DLC, in case of toluene more distinct than for toluene. IR-spectroscopy gave indications of SiC and C–H bonds.

Titel der Zeitschrift, Zeitung oder Schriftenreihe: Nuclear Instruments and Methods in Physics Research Section B
Band: 257
(Heft-)Nummer: 1-2
Verlag: Elsevier
Fachbereich(e)/-gebiet(e): Fachbereich Material- und Geowissenschaften > Materialwissenschaften > Materialanalytik
Fachbereich Material- und Geowissenschaften > Materialwissenschaften
Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 20 Nov 2008 08:28
Zusätzliche Informationen:

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15th International Conference on Ion Beam Modification of Materials

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