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Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures

Ensinger, Wolfgang and Volz, Kerstin and Baba, Koumei and Hatada, Ruriko (2007):
Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures.
In: Nuclear Instruments and Methods in Physics Research Section B, Elsevier, pp. 692-695, 257, (1-2), [Article]

Abstract

Plasma immersion ion implantation of silicon with methane, toluene and mixtures of both as plasma-foming gases gave films of amorphous carbon (a-C:H, or diamond-like carbon DLC) on a transition zone of silicon carbide, as shown by X-ray photoelectron spectrometry and Rutherford backscattering spectrometry. Toluene leads to faster DLC film growth than methane. Raman spectra showed the typical D- and G-bands of DLC, in case of toluene more distinct than for toluene. IR-spectroscopy gave indications of SiC and C–H bonds.

Item Type: Article
Erschienen: 2007
Creators: Ensinger, Wolfgang and Volz, Kerstin and Baba, Koumei and Hatada, Ruriko
Title: Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures
Language: English
Abstract:

Plasma immersion ion implantation of silicon with methane, toluene and mixtures of both as plasma-foming gases gave films of amorphous carbon (a-C:H, or diamond-like carbon DLC) on a transition zone of silicon carbide, as shown by X-ray photoelectron spectrometry and Rutherford backscattering spectrometry. Toluene leads to faster DLC film growth than methane. Raman spectra showed the typical D- and G-bands of DLC, in case of toluene more distinct than for toluene. IR-spectroscopy gave indications of SiC and C–H bonds.

Journal or Publication Title: Nuclear Instruments and Methods in Physics Research Section B
Volume: 257
Number: 1-2
Publisher: Elsevier
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 20 Nov 2008 08:28
Additional Information:

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