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Article

Wohlgemuth, Christian and Sindlinger, Stefan and Werthschützky, Roland and Thiele, P. (2005):
Mikrogehäuste mediengetrennte Silizium-Druck- und Differenzdrucksensoren für industrielle Anwendungen.
72, In: tm, Technisches Messen, pp. 638-645, [Article]

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