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2013
Alff, Lambert ; Hildebrandt, Sandra ; Kober, Timo ; Teipen, R. ; Tham, A. T. ; Werthschützky, Roland (2013)
Plate-like glass structure for manufacturing pressure sensor, has recessed contour portion that is surrounded by planar edge area, and specific glass surface whose surface roughness value and diameter are set to predetermined ranges.
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