TU Darmstadt / ULB / TUbiblio

Plate-like glass structure for manufacturing pressure sensor, has recessed contour portion that is surrounded by planar edge area, and specific glass surface whose surface roughness value and diameter are set to predetermined ranges

Alff, Lambert and Hildebrandt, Sandra and Kober, Timo and Teipen, R. and Tham, A. T. and Werthschützky, Roland (2013):
Plate-like glass structure for manufacturing pressure sensor, has recessed contour portion that is surrounded by planar edge area, and specific glass surface whose surface roughness value and diameter are set to predetermined ranges.
[Standards, patents]

Item Type: Standards, patents
Erschienen: 2013
Creators: Alff, Lambert and Hildebrandt, Sandra and Kober, Timo and Teipen, R. and Tham, A. T. and Werthschützky, Roland
Title: Plate-like glass structure for manufacturing pressure sensor, has recessed contour portion that is surrounded by planar edge area, and specific glass surface whose surface roughness value and diameter are set to predetermined ranges
Language: English
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Advanced Thin Film Technology
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 09 Jan 2014 10:00
Identification Number: DE102011084457-A1; EP2581722-A2
Export:

Optionen (nur für Redakteure)

View Item View Item