TU Darmstadt / ULB / TUbiblio

Plate-like glass structure for manufacturing pressure sensor, has recessed contour portion that is surrounded by planar edge area, and specific glass surface whose surface roughness value and diameter are set to predetermined ranges

Alff, Lambert ; Hildebrandt, Sandra ; Kober, Timo ; Teipen, R. ; Tham, A. T. ; Werthschützky, Roland :
Endress + Hauser GmbH&Co. KG (ENDR-C)
Plate-like glass structure for manufacturing pressure sensor, has recessed contour portion that is surrounded by planar edge area, and specific glass surface whose surface roughness value and diameter are set to predetermined ranges.
DE102011084457-A1; EP2581722-A2.
[Patent], (2013)

Typ des Eintrags: Patent
Erschienen: 2013
Autor(en): Alff, Lambert ; Hildebrandt, Sandra ; Kober, Timo ; Teipen, R. ; Tham, A. T. ; Werthschützky, Roland
Titel: Plate-like glass structure for manufacturing pressure sensor, has recessed contour portion that is surrounded by planar edge area, and specific glass surface whose surface roughness value and diameter are set to predetermined ranges
Sprache: Englisch
Fachbereich(e)/-gebiet(e): Fachbereich Material- und Geowissenschaften > Materialwissenschaften > Dünne Schichten, Advanced Thin Film Technology
Fachbereich Material- und Geowissenschaften > Materialwissenschaften
Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 09 Jan 2014 10:00
ID-Nummer: DE102011084457-A1; EP2581722-A2
Export:

Optionen (nur für Redakteure)

Eintrag anzeigen Eintrag anzeigen