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Klein, Sylke ; Hahn, Horst ; Balogh, Adam G. ; Rück, D. M. ; Baumann, H. ; Michelmann, Rolf W. (1995)
Amorphisation of (100) oriented silicon by self implantation.
In: Jahresbericht / Institut für Kernphysik der Johann Wolfgang Goethe-Universität
Article, Bibliographie

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