Article

Klemberg-Sapieha, J. (1996):
Plasma deposition of low-stress electret films on electroacoustic and solar cell application.
In: Journal of Vacuum Science and Technology A, 14 (5), pp. 2775-2780. American Vacuum Society (AVS), ISSN 0734-2101,
DOI: 10.1116/1.580199,
[Article]

Klemberg-Sapieha, J. (1996):
Plasma deposition of low-stress electret films on electroacoustic and solar cell application.
In: Journal of vacuum science and technology. A 14 (1996), No. 5, S. 2745-2780, [Article]

Klemberg-Sapieha, J. ; Martinu, L. ; Thielemann, C. ; Günther, P. (1995):
Plasma deposition of low stress electret films for electroacoustic and solar cell applications.
In: Journal of vaccum science and technology. 13 (1995), [Article]