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Plasma deposition of low stress electret films for electroacoustic and solar cell applications

Klemberg-Sapieha, J. and Martinu, L. and Thielemann, C. and Günther, P. (1995):
Plasma deposition of low stress electret films for electroacoustic and solar cell applications.
In: Journal of vaccum science and technology. 13 (1995), [Article]

Item Type: Article
Erschienen: 1995
Creators: Klemberg-Sapieha, J. and Martinu, L. and Thielemann, C. and Günther, P.
Title: Plasma deposition of low stress electret films for electroacoustic and solar cell applications
Language: English
Journal or Publication Title: Journal of vaccum science and technology. 13 (1995)
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:28
License: [undefiniert]
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