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Ensinger, Wolfgang ; Flege, Stefan ; Kiuchi, M. ; Honjo, K. (2012):
Chromium nitride films formed by ion beam assisted deposition at low nitrogen ion energies in comparison to high energies.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 272 (0), pp. 437-440. Elsevier Science Publishing Company, [Article]
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