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Ensinger, Wolfgang and Flege, Stefan and Kiuchi, M. and Honjo, K. (2012):
Chromium nitride films formed by ion beam assisted deposition at low nitrogen ion energies in comparison to high energies.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 272 (0), Elsevier Science Publishing Company, pp. 437-440, [Online-Edition: http://www.sciencedirect.com/science/article/pii/S0168583X11...],
[Article]

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