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Neubeck, Klaus ; Nitsche, R. ; Hahn, H. ; Alberts, L. ; Wolf, G. K. ; Friz, M. (1995)
Ion beam assisted deposition of ZrO2 thin films.
In: Nuclear instruments and methods in physics research B, 106 (1-4)
doi: 10.1016/0168-583X(95)00687-7
Article, Bibliographie

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