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Ion beam assisted deposition of ZrO2 thin films

Neubeck, Klaus ; Nitsche, R. ; Hahn, H. ; Alberts, L. ; Wolf, G. K. ; Friz, M. (1995):
Ion beam assisted deposition of ZrO2 thin films.
In: Nuclear instruments and methods in physics research B, 106 (1-4), pp. 110-115. Elsevier, ISSN 0168-583X,
DOI: 10.1016/0168-583X(95)00687-7,
[Article]

Item Type: Article
Erschienen: 1995
Creators: Neubeck, Klaus ; Nitsche, R. ; Hahn, H. ; Alberts, L. ; Wolf, G. K. ; Friz, M.
Title: Ion beam assisted deposition of ZrO2 thin films
Language: English
Journal or Publication Title: Nuclear instruments and methods in physics research B
Journal Volume: 106
Issue Number: 1-4
Publisher: Elsevier
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Department of Earth Sciences (1999 merged into Department of Materials and Earth Sciences)
Date Deposited: 19 Nov 2008 15:58
DOI: 10.1016/0168-583X(95)00687-7
License: [undefiniert]
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