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Ion beam assisted deposition of ZrO2 thin films

Neubeck, Klaus and Nitsche, and Hahn, and Alberts, and Wolf, and Friz, (1995):
Ion beam assisted deposition of ZrO2 thin films.
In: Nuclear instruments and methods in physics research. B 106 (1995), S. 110-115, [Article]

Item Type: Article
Erschienen: 1995
Creators: Neubeck, Klaus and Nitsche, and Hahn, and Alberts, and Wolf, and Friz,
Title: Ion beam assisted deposition of ZrO2 thin films
Language: English
Journal or Publication Title: Nuclear instruments and methods in physics research. B 106 (1995), S. 110-115
Divisions: 11 Department of Materials and Earth Sciences > Fachbereich Materialwissenschaft (1999 aufgegangen in 11 Fachbereich Material- und Geowissenschaften)
11 Department of Materials and Earth Sciences
Date Deposited: 19 Nov 2008 15:58
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