Neubeck, Klaus ; Nitsche, R. ; Hahn, H. ; Alberts, L. ; Wolf, G. K. ; Friz, M. (1995):
Ion beam assisted deposition of ZrO2 thin films.
In: Nuclear instruments and methods in physics research B, 106 (1-4), pp. 110-115. Elsevier, ISSN 0168-583X,
DOI: 10.1016/0168-583X(95)00687-7,
[Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1995 |
| Creators: | Neubeck, Klaus ; Nitsche, R. ; Hahn, H. ; Alberts, L. ; Wolf, G. K. ; Friz, M. |
| Title: | Ion beam assisted deposition of ZrO2 thin films |
| Language: | English |
| Journal or Publication Title: | Nuclear instruments and methods in physics research B |
| Journal Volume: | 106 |
| Issue Number: | 1-4 |
| Publisher: | Elsevier |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Department of Earth Sciences (1999 merged into Department of Materials and Earth Sciences) |
| Date Deposited: | 19 Nov 2008 15:58 |
| DOI: | 10.1016/0168-583X(95)00687-7 |
| License: | [undefiniert] |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
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