Neubeck, Klaus ; Nitsche, R. ; Hahn, H. ; Alberts, L. ; Wolf, G. K. ; Friz, M. (1995):
Ion beam assisted deposition of ZrO2 thin films.
In: Nuclear instruments and methods in physics research B, 106 (1-4), pp. 110-115. Elsevier, ISSN 0168-583X,
DOI: 10.1016/0168-583X(95)00687-7,
[Article]
Item Type: | Article |
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Erschienen: | 1995 |
Creators: | Neubeck, Klaus ; Nitsche, R. ; Hahn, H. ; Alberts, L. ; Wolf, G. K. ; Friz, M. |
Title: | Ion beam assisted deposition of ZrO2 thin films |
Language: | English |
Journal or Publication Title: | Nuclear instruments and methods in physics research B |
Journal Volume: | 106 |
Issue Number: | 1-4 |
Publisher: | Elsevier |
Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Department of Earth Sciences (1999 merged into Department of Materials and Earth Sciences) |
Date Deposited: | 19 Nov 2008 15:58 |
DOI: | 10.1016/0168-583X(95)00687-7 |
License: | [undefiniert] |
Export: | |
Suche nach Titel in: | TUfind oder in Google |
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