Artikel

Schmidt, Niclas ; Kaiser, Nico ; Vogel, Tobias ; Piros, Eszter ; Karthäuser, Silvia ; Waser, Rainer ; Alff, Lambert ; Dittmann, Regina (2024)
Impact of non‐stoichiometric phases and grain boundaries on the nanoscale forming and switching of HfOₓ thin films.
In: Advanced Electronic Materials, 10 (4)
doi: 10.1002/aelm.202300693
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