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InGaAs/InP thermoelectric infrared sensor utilizing surface bulk micromachining technology

Dehé, Alfons ; Pavlidis, ; Hong, ; Hartnagel, (1997)
InGaAs/InP thermoelectric infrared sensor utilizing surface bulk micromachining technology.
In: IEEE Transactions on Electron Devices, 44 (7)
Article

Item Type: Article
Erschienen: 1997
Creators: Dehé, Alfons ; Pavlidis, ; Hong, ; Hartnagel,
Type of entry: Bibliographie
Title: InGaAs/InP thermoelectric infrared sensor utilizing surface bulk micromachining technology
Language: English
Date: 1 January 1997
Publisher: IEEE
Journal or Publication Title: IEEE Transactions on Electron Devices
Volume of the journal: 44
Issue Number: 7
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:04
Last Modified: 30 Mar 2023 12:40
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