Miao, Jianmin ; Hartnagel, ; Tinschert, ; Rück, ; Fricke, (1994):
Fabrication of thin semi-insulating GaAs membranes by ion implantation and its application for piezoelectric actuators.
In: Gesellschaft für Schwerionenforschung: Scientific report 1994. - Darmstadt: GSI,1995. S. 185, Darmstadt, GSI, [Book Section]
| Item Type: | Book Section |
|---|---|
| Erschienen: | 1994 |
| Creators: | Miao, Jianmin ; Hartnagel, ; Tinschert, ; Rück, ; Fricke, |
| Title: | Fabrication of thin semi-insulating GaAs membranes by ion implantation and its application for piezoelectric actuators |
| Language: | English |
| Book Title: | Gesellschaft für Schwerionenforschung: Scientific report 1994. - Darmstadt: GSI,1995. S. 185 |
| Place of Publication: | Darmstadt |
| Publisher: | GSI |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
| Date Deposited: | 19 Nov 2008 15:54 |
| License: | [undefiniert] |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
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