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Fabrication of thin semi-insulating GaAs membranes by ion implantation and its application for piezoelectric actuators

Miao, Jianmin ; Hartnagel, ; Tinschert, ; Rück, (1994)
Fabrication of thin semi-insulating GaAs membranes by ion implantation and its application for piezoelectric actuators.
In: Gesellschaft für Schwerionenforschung: Scientific report 1994
Book Section, Bibliographie

Item Type: Book Section
Erschienen: 1994
Creators: Miao, Jianmin ; Hartnagel, ; Tinschert, ; Rück,
Type of entry: Bibliographie
Title: Fabrication of thin semi-insulating GaAs membranes by ion implantation and its application for piezoelectric actuators
Language: English
Date: 1994
Place of Publication: Darmstadt
Publisher: GSI
Book Title: Gesellschaft für Schwerionenforschung: Scientific report 1994
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 15:54
Last Modified: 08 Mar 2023 12:57
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