TU Darmstadt / ULB / TUbiblio

Hydrogen Charging Effects in Pd/Ti/TiO2/Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods

Drogowska, K. ; Flege, Stefan ; Schmitt, C. ; Rogalla, D. ; Becker, H.-W. ; Nhu-Tarnawska, H. K. N. ; Brudnik, A. ; Tarnawski, Z. ; Zakrzewska, K. ; Marszalek, M. ; Balogh, A. G. (2012)
Hydrogen Charging Effects in Pd/Ti/TiO2/Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods.
In: Advances in Materials Science and Engineering, 2012
Article, Bibliographie

Abstract

Titanium and titanium dioxide thin films were deposited onto Si(111) substrates by magnetron sputtering from ametallic Ti target in a reactive Ar+O2 atmosphere, the composition of which was controlled by precision gas controllers. For some samples, 1/3 of the surface was covered with palladium using molecular beam epitaxy. Chemical composition, density, and layer thickness of the layers were determined by Auger electron spectroscopy (AES) and Rutherford backscattering spectrometry (RBS). The surface morphology was studied using high-resolution scanning electron microscopy (HRSEM). After deposition, smooth, homogenous sample surfaces were observed. Hydrogen charging for 5 hours under pressure of 1 bar and at temperature of 300◦C results in granulation of the surface. Hydrogen depth profile was determined using secondary ion mass spectrometry (SIMS) and nuclear Reaction Analysis (N-15 method), using a 15N beam at and above the resonance energy of 6.417 MeV. NRA measurements proved a higher hydrogen concentration in samples with partially covered top layers, than in samples without palladium. The highest value of H concentration after charging was about 50% (in the palladium-covered part) and about 40% in titanium that was not covered by Pd. These values are in good agreement with the results of SIMS measurements.

Item Type: Article
Erschienen: 2012
Creators: Drogowska, K. ; Flege, Stefan ; Schmitt, C. ; Rogalla, D. ; Becker, H.-W. ; Nhu-Tarnawska, H. K. N. ; Brudnik, A. ; Tarnawski, Z. ; Zakrzewska, K. ; Marszalek, M. ; Balogh, A. G.
Type of entry: Bibliographie
Title: Hydrogen Charging Effects in Pd/Ti/TiO2/Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods
Language: English
Date: 2012
Publisher: Hindawi Publishing Corporation
Journal or Publication Title: Advances in Materials Science and Engineering
Volume of the journal: 2012
URL / URN: http://www.hindawi.com/journals/amse/2012/269603/
Abstract:

Titanium and titanium dioxide thin films were deposited onto Si(111) substrates by magnetron sputtering from ametallic Ti target in a reactive Ar+O2 atmosphere, the composition of which was controlled by precision gas controllers. For some samples, 1/3 of the surface was covered with palladium using molecular beam epitaxy. Chemical composition, density, and layer thickness of the layers were determined by Auger electron spectroscopy (AES) and Rutherford backscattering spectrometry (RBS). The surface morphology was studied using high-resolution scanning electron microscopy (HRSEM). After deposition, smooth, homogenous sample surfaces were observed. Hydrogen charging for 5 hours under pressure of 1 bar and at temperature of 300◦C results in granulation of the surface. Hydrogen depth profile was determined using secondary ion mass spectrometry (SIMS) and nuclear Reaction Analysis (N-15 method), using a 15N beam at and above the resonance energy of 6.417 MeV. NRA measurements proved a higher hydrogen concentration in samples with partially covered top layers, than in samples without palladium. The highest value of H concentration after charging was about 50% (in the palladium-covered part) and about 40% in titanium that was not covered by Pd. These values are in good agreement with the results of SIMS measurements.

Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 19 Dec 2011 12:45
Last Modified: 05 Mar 2013 09:57
PPN:
Funders: This work was supported by MPD Programme “Krakow Interdisciplinary PhD-Project in Nanoscience and Advanced Nanostructures” operated within the Foundation for Polish Science and cofinanced by the EU European Regional Development Fund.
Export:
Suche nach Titel in: TUfind oder in Google
Send an inquiry Send an inquiry

Options (only for editors)
Show editorial Details Show editorial Details