Rombach, Pirmin and Steiger, and Langheinrich, (1995):
Planar coils with ferromagnetic yoke for a micromachined torque sensor.
In: Journal of micromechanics and microengineering. 5 (1995), S. 136-138, [Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1995 |
| Creators: | Rombach, Pirmin and Steiger, and Langheinrich, |
| Title: | Planar coils with ferromagnetic yoke for a micromachined torque sensor |
| Language: | English |
| Journal or Publication Title: | Journal of micromechanics and microengineering. 5 (1995), S. 136-138 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology |
| Date Deposited: | 19 Nov 2008 15:58 |
| License: | [undefiniert] |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
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