Rombach, Pirmin ; Steiger, H. ; Langheinrich, W. (1995):
Planar coils with ferromagnetic yoke for a micromachined torque sensor.
In: Journal of Micromechanics and Microengineering, 5, pp. 136-138. IOP Publishing Ltd, ISSN 0960-1317,
[Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1995 |
| Creators: | Rombach, Pirmin ; Steiger, H. ; Langheinrich, W. |
| Title: | Planar coils with ferromagnetic yoke for a micromachined torque sensor |
| Language: | English |
| Journal or Publication Title: | Journal of Micromechanics and Microengineering |
| Volume of the journal: | 5 |
| Publisher: | IOP Publishing Ltd |
| Divisions: | 18 Department of Electrical Engineering and Information Technology |
| Date Deposited: | 19 Nov 2008 15:58 |
| License: | [undefiniert] |
| PPN: | |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
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