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Planar coils with ferromagnetic yoke for a micromachined torque sensor

Rombach, Pirmin ; Steiger, H. ; Langheinrich, W. (1995)
Planar coils with ferromagnetic yoke for a micromachined torque sensor.
In: Journal of Micromechanics and Microengineering, 5
Article, Bibliographie

Item Type: Article
Erschienen: 1995
Creators: Rombach, Pirmin ; Steiger, H. ; Langheinrich, W.
Type of entry: Bibliographie
Title: Planar coils with ferromagnetic yoke for a micromachined torque sensor
Language: English
Date: 1995
Publisher: IOP Publishing Ltd
Journal or Publication Title: Journal of Micromechanics and Microengineering
Volume of the journal: 5
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 15:58
Last Modified: 17 Jan 2022 11:00
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