TU Darmstadt / ULB / TUbiblio

High-accuracy deflection measurement of a piezoelectric beam multilayer actuator with an integrated capacitive strain sensor

Ballas, Ruediger ; Schmid, Andreas Joseph ; Schlaak, Helmut F. ; Mössinger, A. ; Meissner, Peter ; Töpfer, U. ; Murmann-Biesenecker, H. ; Munz, G. ; Maichl, M. (2004)
High-accuracy deflection measurement of a piezoelectric beam multilayer actuator with an integrated capacitive strain sensor.
Conference or Workshop Item, Bibliographie

Item Type: Conference or Workshop Item
Erschienen: 2004
Creators: Ballas, Ruediger ; Schmid, Andreas Joseph ; Schlaak, Helmut F. ; Mössinger, A. ; Meissner, Peter ; Töpfer, U. ; Murmann-Biesenecker, H. ; Munz, G. ; Maichl, M.
Type of entry: Bibliographie
Title: High-accuracy deflection measurement of a piezoelectric beam multilayer actuator with an integrated capacitive strain sensor
Language: English
Date: 2004
Place of Publication: Microtechnology, Mechatronics and Materials
Publisher: international conference [in connection with] O.M.P. - Opto Micro Products
Series: My2M 2004 <1, 2004, Nürnberg>: Proceedings ... - Microtechnology, Mechatronics and Materials : international conference [in connection with] O.M.P. - Opto Micro Products, International Trade Fair for Optical and Microtechnology Products, 25 - 27 May 2004
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
Date Deposited: 20 Nov 2008 08:22
Last Modified: 19 Apr 2016 08:00
PPN:
Export:
Suche nach Titel in: TUfind oder in Google
Send an inquiry Send an inquiry

Options (only for editors)
Show editorial Details Show editorial Details