Schmidt, J. ; Töpfer, U. ; Ballas, Ruediger ; Schlaak, Helmut F. ; Munz, G. ; Maichl, M. ; Münzenmaier, A. (2003)
Piezoelectric beam multilayer actuator with an integrated capacitive strain sensor to detect deflection.
Conference or Workshop Item, Bibliographie
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2003 |
| Creators: | Schmidt, J. ; Töpfer, U. ; Ballas, Ruediger ; Schlaak, Helmut F. ; Munz, G. ; Maichl, M. ; Münzenmaier, A. |
| Type of entry: | Bibliographie |
| Title: | Piezoelectric beam multilayer actuator with an integrated capacitive strain sensor to detect deflection |
| Language: | German |
| Date: | 2003 |
| Place of Publication: | Wunstorf |
| Publisher: | AMA Service Ges. |
| Series: | SENSOR 2003 : 11th international conference ; 13 - 15 May 2003, Exhibition Centre Nuremberg, Germany ; proceedings / an event of the Association for Sensor Technology, AMA.- Wunstorf : AMA Service Ges., 2003.- S. 279-286 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018) |
| Date Deposited: | 20 Nov 2008 08:22 |
| Last Modified: | 19 Apr 2016 07:50 |
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