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Comparison of SIMS and e-beam SNMS depth profiling results using oxygen, cesium and argon as primary ions

Breuer, U. ; Holzbrecher, H. ; Gastel, M. ; Becker, J. S. ; Dietze, H.-J.
ed.: Benninghoven, A. (1997)
Comparison of SIMS and e-beam SNMS depth profiling results using oxygen, cesium and argon as primary ions.
International Conference on Secondary Ion Mass Spectrometry (SIMS X). Muenster (October 1-6, 1995)
Conference or Workshop Item, Bibliographie

Item Type: Conference or Workshop Item
Erschienen: 1997
Editors: Benninghoven, A.
Creators: Breuer, U. ; Holzbrecher, H. ; Gastel, M. ; Becker, J. S. ; Dietze, H.-J.
Type of entry: Bibliographie
Title: Comparison of SIMS and e-beam SNMS depth profiling results using oxygen, cesium and argon as primary ions
Language: English
Date: 1997
Place of Publication: Chicheter
Publisher: Wiley
Book Title: Secondary ion mass spectrometry
Series: International Conference on Secondary Ion Mass Spectrometry <10, 1997>: Proceedings. Hrsg.: A. Benninghoven (u.a.) S. 391-394
Event Title: International Conference on Secondary Ion Mass Spectrometry (SIMS X)
Event Location: Muenster
Event Dates: October 1-6, 1995
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Department of Earth Sciences (1999 merged into Department of Materials and Earth Sciences)
Date Deposited: 19 Nov 2008 16:23
Last Modified: 18 Apr 2024 08:57
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