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Indium phosphide based bulked micromachining technology for micromechanically tunable WDM filter applications

Pfeiffer, Joachim ; Riemenschneider, R. ; Mutamba, K. ; Peerlings, J. ; Afshar, B. E. ; Baaser, Herbert ; Grunert, D. ; Meissner, P. ; Hartnagel, H. L. (1999):
Indium phosphide based bulked micromachining technology for micromechanically tunable WDM filter applications.
In: TRANSDUCERS'99 <1999, Sendai, Japan>: Proceedings. S. 380-383, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1999
Creators: Pfeiffer, Joachim ; Riemenschneider, R. ; Mutamba, K. ; Peerlings, J. ; Afshar, B. E. ; Baaser, Herbert ; Grunert, D. ; Meissner, P. ; Hartnagel, H. L.
Title: Indium phosphide based bulked micromachining technology for micromechanically tunable WDM filter applications
Language: English
Series: TRANSDUCERS'99 <1999, Sendai, Japan>: Proceedings. S. 380-383
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:22
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