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Heinickel, Patrick and Werthschützky, Roland and Hummel, Wolf-Joachim (2011):
Optimized electrical feed through for a piezoresistive silicon high-pressure sensing element up to 500 MPa.
In: Sensor+Test Conference 2011. Proceedings Sensor, Volume I., Nürnberg, In: Sensor+Test Conference 2011, [Conference or Workshop Item]

This list was generated on Tue Jun 18 02:14:37 2019 CEST.