Winterstein, Thomas ; Staab, Matthias ; Nakic, Christian ; Feige, Hans-Jürgen ; Vogel, Jürgen ; Schlaak, Helmut F. (2014)
SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use.
In: Micromachines, Special Issue Microactuators
doi: 10.3390/mi5041310
Artikel, Bibliographie