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Hoche, Holger and Allebrandt, D. and Bruns, M. and Riedel, Ralf and Fasel, C. (2008):
Relationship of chemical and structural properties with the tribological behavior of sputtered SiCN films.
In: Surface and Coatings Technology, 202 (22-23), pp. 5567-5571. Elsevier, ISSN 02578972,
[Article]

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