Hoche, Holger ; Allebrandt, D. ; Bruns, M. ; Riedel, Ralf ; Fasel, C. (2008)
Relationship of chemical and structural properties with the tribological behavior of sputtered SiCN films.
In: Surface and Coatings Technology, 202 (22-23)
doi: 10.1016/j.surfcoat.2008.06.126
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