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Hoche, Holger and Allebrandt, D. and Bruns, M. and Riedel, Ralf and Fasel, C. :
Relationship of chemical and structural properties with the tribological behavior of sputtered SiCN films.
[Online-Edition: http://dx.doi.org/10.1016/j.surfcoat.2008.06.126]
In: Surface and Coatings Technology, 202 (22-23) pp. 5567-5571. ISSN 02578972
[Article] , (2008)

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