Aldeeb, Mustafa A. ; Morgan, Nasser ; Abouelsayed, Ahmed ; Amin, Khaled M. ; Hassaballa, Safwat (2020):
Electrical and Optical Characterization of Acetylene RF CCP for Synthesis of Different Forms of Hydrogenated Amorphous Carbon Films.
In: Plasma Chemistry and Plasma Processing, 40 (1), pp. 387-406. Springer, ISSN 15728986,
DOI: 10.1007/s11090-019-10031-8,
[Article]