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Interferometrical profilometry at surfaces with varying materials

Jennewein, Holger and Gottschling, H. and Ganz, T. and Tschudi, Theo (1999):
Interferometrical profilometry at surfaces with varying materials.
3677In: SPIE (Society for Photo-Optical Instrumentation Engineers) Proceedings, pp. 1009-1016, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1999
Creators: Jennewein, Holger and Gottschling, H. and Ganz, T. and Tschudi, Theo
Title: Interferometrical profilometry at surfaces with varying materials
Language: German
Series Name: SPIE (Society for Photo-Optical Instrumentation Engineers) Proceedings
Volume: 3677
Divisions: 05 Department of Physics
Date Deposited: 19 Nov 2008 16:05
License: [undefiniert]
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