Inoi, T. ; Baba, K. ; Flege, S. ; Hatada, R. ; Ensinger, W. (2018)
Preparation of iodine containing diamond-like carbon films by trifluoroiodomethane.
In: Materials Letters, 215
doi: 10.1016/j.matlet.2017.12.061
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Iodine containing diamond-like carbon (DLC) films were prepared by a plasma-enhanced chemical vapor deposition process using a mixture of trifluoroiodomethane (CF3I) and acetylene (C2H2) as plasma gas. The resulting films contain iodine throughout but are mostly fluorine free. Even though the precursor contains more fluorine than iodine, fluorine is only present in larger concentrations in the surface and interface region. The films are smooth, show a decreased hardness and a higher contact angle as compared to iodine free DLC films.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2018 |
| Autor(en): | Inoi, T. ; Baba, K. ; Flege, S. ; Hatada, R. ; Ensinger, W. |
| Art des Eintrags: | Bibliographie |
| Titel: | Preparation of iodine containing diamond-like carbon films by trifluoroiodomethane |
| Sprache: | Englisch |
| Publikationsjahr: | 15 März 2018 |
| Verlag: | Elsevier Science Publishing |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Materials Letters |
| Jahrgang/Volume einer Zeitschrift: | 215 |
| DOI: | 10.1016/j.matlet.2017.12.061 |
| URL / URN: | https://doi.org/10.1016/j.matlet.2017.12.061 |
| Kurzbeschreibung (Abstract): | Iodine containing diamond-like carbon (DLC) films were prepared by a plasma-enhanced chemical vapor deposition process using a mixture of trifluoroiodomethane (CF3I) and acetylene (C2H2) as plasma gas. The resulting films contain iodine throughout but are mostly fluorine free. Even though the precursor contains more fluorine than iodine, fluorine is only present in larger concentrations in the surface and interface region. The films are smooth, show a decreased hardness and a higher contact angle as compared to iodine free DLC films. |
| Freie Schlagworte: | Diamond-like carbon, Plasma Deposition, Iodine, Thin film |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften |
| Hinterlegungsdatum: | 28 Dez 2017 09:52 |
| Letzte Änderung: | 28 Dez 2017 09:52 |
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