TU Darmstadt / ULB / TUbiblio

Preparation of anatase films from titanium containing diamond-like carbon films

Hatada, R. ; Flege, S. ; Ensinger, W. ; Baba, K. (2018)
Preparation of anatase films from titanium containing diamond-like carbon films.
In: Materials Letters, 213
doi: 10.1016/j.matlet.2017.11.034
Artikel, Bibliographie

Kurzbeschreibung (Abstract)

Carbon can play a decisive role in the preparation of the titanium dioxide modification anatase. Amorphous titanium containing diamond-like carbon films are a suitable basis for this process. Those films can be deposited by a process that combines reactive magnetron sputtering with plasma source ion implantation, using a mixture of argon and ethylene (C2H4) for the plasma. After film deposition, annealing of the samples for 1 h at a fixed temperature between 723 K and 873 K in ambient atmosphere led to oxidation and crystallization. Colorless pure anatase was observed after annealing.

Typ des Eintrags: Artikel
Erschienen: 2018
Autor(en): Hatada, R. ; Flege, S. ; Ensinger, W. ; Baba, K.
Art des Eintrags: Bibliographie
Titel: Preparation of anatase films from titanium containing diamond-like carbon films
Sprache: Englisch
Publikationsjahr: 15 Februar 2018
Verlag: Elsevier Science Publishing
Titel der Zeitschrift, Zeitung oder Schriftenreihe: Materials Letters
Jahrgang/Volume einer Zeitschrift: 213
DOI: 10.1016/j.matlet.2017.11.034
URL / URN: https://doi.org/10.1016/j.matlet.2017.11.034
Kurzbeschreibung (Abstract):

Carbon can play a decisive role in the preparation of the titanium dioxide modification anatase. Amorphous titanium containing diamond-like carbon films are a suitable basis for this process. Those films can be deposited by a process that combines reactive magnetron sputtering with plasma source ion implantation, using a mixture of argon and ethylene (C2H4) for the plasma. After film deposition, annealing of the samples for 1 h at a fixed temperature between 723 K and 873 K in ambient atmosphere led to oxidation and crystallization. Colorless pure anatase was observed after annealing.

Freie Schlagworte: Thin films, Oxidation, Anatase, Deposition
Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 28 Dez 2017 09:46
Letzte Änderung: 28 Dez 2017 09:46
PPN:
Export:
Suche nach Titel in: TUfind oder in Google
Frage zum Eintrag Frage zum Eintrag

Optionen (nur für Redakteure)
Redaktionelle Details anzeigen Redaktionelle Details anzeigen